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Contains information about title and source of a journal
Title: Nanoscale characterization of ultra-thin tungsten films deposited by radio-frequency magnetron sputtering
Source:

Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on [1-4673-8157-8; 1-4673-8156-X] Martínek

yr:2015 pg:510 -513

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